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DESIGN AND FABRICATION OF LOW-VOLTAGE TWISTING-TYPE THERMAL ACTUATORS FOR MICROMIRRORS
- Issue Date
- 2010
- Publisher
- AMER SOC MECHANICAL ENGINEERS
- Keywords
- Micromirror; Bimorph Thermal Actuator; Twisting actuation; MEMS Fabrication
- Citation
- MNHMT2009, VOL 2, pp.373 - 375
- Journal Title
- MNHMT2009, VOL 2
- Start Page
- 373
- End Page
- 375
- Abstract
- A twisting-type micromirror that can be driven by two thermal bimorph actuators bending in opposite directions is designed from electro-thermo-mechanical theories and fabricated through a simple MEMS process. Each actuator consists of SiO(2) and gold thin-film layers. A simplified analytical model has been built to optimize the performance of micromirrors. Operation of the actuation system agrees well with predictions from theoretical models and simulations using a commercial code.
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