A MICROFABRICATED COLUMN COMPRISED OF HIGH-ASPECT-RATIO SILICON PILLAR ARRAYS FOR MICRO-GAS CHROMATOGRAPHY
- Authors
- Seong, Dong Wook; Bae, Sung Kuk; Seo, Jung Hwan
- Issue Date
- 2024
- Publisher
- IEEE
- Keywords
- Silicon Pillar; Micro-Gas Chromatography (mu-GC); Micro-Separation Column; Volatile Organic Compounds (VOCs)
- Citation
- 2024 IEEE 37TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, MEMS, pp 867 - 870
- Pages
- 4
- Journal Title
- 2024 IEEE 37TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, MEMS
- Start Page
- 867
- End Page
- 870
- URI
- https://scholarworks.bwise.kr/hongik/handle/2020.sw.hongik/32980
- DOI
- 10.1109/MEMS58180.2024.10439537
- ISSN
- 1084-6999
- Abstract
- This study introduces the fabrication and application of a micro-pillar array using MEMS processes to improve the performance of a crucial component, the separation column, within mu-GC systems. These micro-pillars, measuring approximately 2 mu m in diameter and 130 mu m in height, were densely packed at a density of around 9000 rods/mm(2) onto the separation column. The substitution of the conventional rectangular-shaped column with pillar arrays resulted in an approximate 40% increase in resolution under identical pressure and oven temperature conditions (0.969psi, 40 degrees C). These findings mark a significant advancement in mu-GC technology, potentially enabling chip size reduction, reduced power consumption, and minimized packaging volume.
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Collections - College of Engineering > Department of Mechanical and System Design Engineering > 1. Journal Articles
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