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Surface chemistry during atomic layer deposition of Zn(O,S)
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 송봉근 | - |
| dc.date.available | 2020-07-10T04:22:05Z | - |
| dc.date.created | 2020-07-08 | - |
| dc.date.issued | 2018-07-30 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/hongik/handle/2020.sw.hongik/3388 | - |
| dc.language | 영어 | - |
| dc.language.iso | en | - |
| dc.publisher | American Vacuum Society | - |
| dc.title | Surface chemistry during atomic layer deposition of Zn(O,S) | - |
| dc.type | Article | - |
| dc.contributor.affiliatedAuthor | 송봉근 | - |
| dc.identifier.bibliographicCitation | ALD 2018, v.ALD 2018, no.0, pp.0 - 0 | - |
| dc.relation.isPartOf | ALD 2018 | - |
| dc.citation.title | ALD 2018 | - |
| dc.citation.volume | ALD 2018 | - |
| dc.citation.number | 0 | - |
| dc.citation.startPage | 0 | - |
| dc.citation.endPage | 0 | - |
| dc.type.rims | ART | - |
| dc.description.journalClass | 1 | - |
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Related Researcher
- Shong, Bong geun
- Engineering (Chemical Engineering)