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Surface chemistry during atomic layer deposition of Zn(O,S)
- Authors
- 송봉근
- Issue Date
- 30-Jul-2018
- Publisher
- American Vacuum Society
- Citation
- ALD 2018, v.ALD 2018, no.0, pp.0 - 0
- Journal Title
- ALD 2018
- Volume
- ALD 2018
- Number
- 0
- Start Page
- 0
- End Page
- 0
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Collections - College of Engineering > Chemical Engineering Major > 1. Journal Articles
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Related Researcher
- Shong, Bong geun
- Engineering (Chemical Engineering)