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리세스 식각 구조를 이용한 β-Ga2O3 에피탁시 공정 설계
- Authors
- 차호영
- Issue Date
- 20-Jun-2018
- Publisher
- 대한전기전자공학회
- Citation
- 2018 한국군사과학기술학회 창립 20주년 종합학술대회, v.0, no.0, pp.0 - 0
- Journal Title
- 2018 한국군사과학기술학회 창립 20주년 종합학술대회
- Volume
- 0
- Number
- 0
- Start Page
- 0
- End Page
- 0
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Related Researcher
- Cha, Ho Young
- Engineering (Electronic & Electrical Engineering)