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An Implementation of a Linear-sensitivity Pressure-sensor System

Authors
Hong, Sung-HeeCho, Chun-Hyung
Issue Date
Apr-2018
Publisher
IEEK PUBLICATION CENTER
Keywords
Pressure-sensor; linearity in sensitivity; sensor-conditioning; sensitivity error
Citation
JOURNAL OF SEMICONDUCTOR TECHNOLOGY AND SCIENCE, v.18, no.2, pp.146 - 152
Journal Title
JOURNAL OF SEMICONDUCTOR TECHNOLOGY AND SCIENCE
Volume
18
Number
2
Start Page
146
End Page
152
URI
https://scholarworks.bwise.kr/hongik/handle/2020.sw.hongik/3874
DOI
10.5573/JSTS.2018.18.2.146
ISSN
1598-1657
Abstract
In this work, we designed and developed an integrated pressure-sensor system with a perfectly linear sensitivity. We used a resistive-type indicator pressure-sensor in order to measure a gas-level which is observed to be inversely proportional to sensor output-resistance. Then, the output resistance was converted into the corresponding voltage which was processed via several sensor-conditioning steps (buffering, level-shifting, amplification). We analyzed the sensitivity errors at level-shifting stage and then proposed the new and simple approach for a perfectly linear-sensitivity in sensor-conditioning processes by using only a constant voltage supply without the potentiometer, which is common in previous works. Even though the sensor output was generally adjusted to the full scale of the reading, we have a perfectly linear sensitivity and the devices fabricated exhibited linear characteristics without any sensitivity error.
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