Design Parameter Optimization of a Silicon-Based Grating Waveguide for Performance Improvement in Biochemical Sensor Application
- Authors
- Hong, Yoo-Seung; Cho, Chun-Hyung; Sung, Hyuk-Kee
- Issue Date
- Mar-2018
- Publisher
- MDPI
- Keywords
- diffraction gratings; grating waveguide; refractive index sensor; biological sensing and sensors; optical sensing and sensors
- Citation
- SENSORS, v.18, no.3
- Journal Title
- SENSORS
- Volume
- 18
- Number
- 3
- URI
- https://scholarworks.bwise.kr/hongik/handle/2020.sw.hongik/3935
- DOI
- 10.3390/s18030781
- ISSN
- 1424-8220
- Abstract
- We performed numerical analysis and design parameter optimization of a silicon-based grating waveguide refractive index (RI) sensor. The performance of the grating waveguide RI sensor was determined by the full-width at half-maximum (FWHM) and the shift in the resonance wavelength in the transmission spectrum. The transmission extinction, a major figure-of-merit of an RI sensor that reflects both FWHM and resonance shift performance, could be significantly improved by the proper determination of three major grating waveguide parameters: duty ratio, grating period, and etching depth. We analyzed the transmission characteristics of the grating waveguide under various design parameter conditions using a finite-difference time domain method. We achieved a transmission extinction improvement of >26 dB under a given bioenvironmental target change by the proper choice of the design procedure and parameters. This design procedure and choice of appropriate parameters would enable the widespread application of silicon-based grating waveguide in high-performance RI biochemical sensor.
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Collections - College of Engineering > School of Electronic & Electrical Engineering > 1. Journal Articles
- College of Science and Technology > Department of Electronic and Electrical Engineering > 1. Journal Articles
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