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Etching Behaviors of Cu and Invar for Metal Core PCB Applications

Authors
Choi, Jong-ChanLee, Jae-Ho
Issue Date
Oct-2017
Publisher
AMER SCIENTIFIC PUBLISHERS
Keywords
FeCl3; CuCl2; CIC(Cu-Invar-Cu); Metal Core PCB (MCPCB); Wet Etching
Citation
JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY, v.17, no.10, pp.7358 - 7361
Journal Title
JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY
Volume
17
Number
10
Start Page
7358
End Page
7361
URI
https://scholarworks.bwise.kr/hongik/handle/2020.sw.hongik/5244
DOI
10.1166/jnn.2017.14826
ISSN
1533-4880
Abstract
CIC (Cu-Invar-Cu) is made up of 3 piece clads of Cu and Invar and has high thermal conductivity and low coefficient of thermal expansion. It is one of the core candidate materials to compensate the disadvantages of conventional PCB. In order to use CIC as the metal core of PCB, etching process is required. In wet etching process, it is difficult to obtain uniform pattern due to different etching rates and etching characteristics of Cu and Invar. In this study, the etching rates and etching properties of Cu and Invar in FeCl3 and CuCl2 were compared. Results showed that FeCl3 had a faster etching rate and higher solubility than CuCl2. The etching characteristics with FeCl3 concentration were investigated and the effect of pattern on etching rate was also studied. In addition, CuCl2 was added to the FeCl3 etchant to change the etching rate and etching characteristics of Cu and invar. Finally, the optimum conditions for uniform patterning were obtained.
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