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Results 1-10 of 26 (Search time: 0.005 seconds).
Demetallization of Molecular Layer Deposited Organic-Inorganic Hybrid Indicone Thin Films by Thermal Annealing
송봉근
Article
Issue Date
2019
Citation
한국반도체학술대회, v.0, no.0, pp.0 - 0
Publisher
한국반도체학술대회
Sequential removal of ligands from TiCl4 on SiO2 surface during atomic layer deposition: a DFT study
송봉근
Article
Issue Date
2019
Citation
한국화학공학회 학술대회 초록집, v.0, no.0, pp.0 - 0
Publisher
한국화학공학회
A comparative theoretical study on molecular layer deposition (MLD) of alucone and indicone nanocomposite thin films
송봉근
Article
Issue Date
2019
Citation
한국화학공학회 학술대회 초록집, v.0, no.0, pp.0 - 0
Publisher
한국화학공학회
Initial nucleation for atomic layer deposition (ALD) of group III oxides: a quantum chemical comparative study
송봉근
Article
Issue Date
2019
Citation
한국화학공학회 학술대회 초록집, v.0, no.0, pp.0 - 0
Publisher
한국화학공학회
Computational screening for metal oxide precursors toward area-selective atomic layer deposition (AS-ALD)
송봉근
Article
Issue Date
2019
Citation
한국반도체학술대회, v.0, no.0, pp.0 - 0
Publisher
한국반도체학술대회
Quantum mechanical analysis of chemical reactions during atomic layer deposition
송봉근
Article
Issue Date
2019
Citation
한국 ALD workshop, v.0, no.0, pp.0 - 0
Publisher
한양대학교
Mechanistic investigation on atomic layer deposition of group 13 oxides
송봉근
Article
Issue Date
2019
Citation
한국반도체학술대회, v.0, no.0, pp.0 - 0
Publisher
한국반도체학술대회
Molecular adsorption and doping of Hf and Zr dichalcogenides
송봉근
Article
Issue Date
2019
Citation
한국반도체학술대회, v.0, no.0, pp.0 - 0
Publisher
한국반도체학술대회
Atomic Layer Modulation for Multicomponent Thin Films
송봉근
Article
Issue Date
2019
Citation
한국반도체학술대회, v.0, no.0, pp.0 - 0
Publisher
한국반도체학술대회
Chemical mechanism of formation of the 2-dimensional electron gas at the Al2O3/TiO2 interface by atomic layer deposition
송봉근
Article
Issue Date
2019
Citation
한국반도체학술대회, v.0, no.0, pp.0 - 0
Publisher
한국반도체학술대회
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Subject
GROWTH
5
CHEMICAL-VAPOR-DEPOSITION
3
H2O
2
MECHANISM
2
NH3
2
OXIDE
2
OZONE
2
ADSORPTION
1
AL2O3
1
ALD
1
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Type
Article
26
Language
English
24
Korean
2
Journal
한국반도체학술대회
8
Chemistry of Materials
3
한국화학공학회 학술대회 초록집
3
ALD 2019
2
ACS Applied Materials and Interfaces
1
Applied Surface Science
1
Atomic Craft Workshop
1
Ceramics International
1
China-Korea ALD Workshop
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ECS meeting abstracts
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