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Results 1-10 of 97 (Search time: 0.025 seconds).
Electrochemical formic acid oxidation on Pt and Pt/Au with adsorbed Bi
송봉근
Article
Issue Date
2017
Citation
대한화학회 대전세종충남지부 학술대회, v.0, no.0, pp.0 - 0
Publisher
대한화학회
Demetallization of Molecular Layer Deposited Organic-Inorganic Hybrid Indicone Thin Films by Thermal Annealing
송봉근
Article
Issue Date
2019
Citation
한국반도체학술대회, v.0, no.0, pp.0 - 0
Publisher
한국반도체학술대회
Sequential removal of ligands from TiCl4 on SiO2 surface during atomic layer deposition: a DFT study
송봉근
Article
Issue Date
2019
Citation
한국화학공학회 학술대회 초록집, v.0, no.0, pp.0 - 0
Publisher
한국화학공학회
A comparative theoretical study on molecular layer deposition (MLD) of alucone and indicone nanocomposite thin films
송봉근
Article
Issue Date
2019
Citation
한국화학공학회 학술대회 초록집, v.0, no.0, pp.0 - 0
Publisher
한국화학공학회
Initial nucleation for atomic layer deposition (ALD) of group III oxides: a quantum chemical comparative study
송봉근
Article
Issue Date
2019
Citation
한국화학공학회 학술대회 초록집, v.0, no.0, pp.0 - 0
Publisher
한국화학공학회
Computational screening for metal oxide precursors toward area-selective atomic layer deposition (AS-ALD)
송봉근
Article
Issue Date
2019
Citation
한국반도체학술대회, v.0, no.0, pp.0 - 0
Publisher
한국반도체학술대회
Quantum mechanical analysis of chemical reactions during atomic layer deposition
송봉근
Article
Issue Date
2019
Citation
한국 ALD workshop, v.0, no.0, pp.0 - 0
Publisher
한양대학교
Mechanistic investigation on atomic layer deposition of group 13 oxides
송봉근
Article
Issue Date
2019
Citation
한국반도체학술대회, v.0, no.0, pp.0 - 0
Publisher
한국반도체학술대회
Molecular adsorption and doping of Hf and Zr dichalcogenides
송봉근
Article
Issue Date
2019
Citation
한국반도체학술대회, v.0, no.0, pp.0 - 0
Publisher
한국반도체학술대회
Atomic Layer Modulation for Multicomponent Thin Films
송봉근
Article
Issue Date
2019
Citation
한국반도체학술대회, v.0, no.0, pp.0 - 0
Publisher
한국반도체학술대회
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Author
Hwang, Jin ha
3
Kim, Bumsang
1
Subject
GROWTH
17
ALD
10
OXIDE
10
THIN-FILMS
9
Atomic layer deposition
8
MECHANISM
7
CHEMICAL-VAPOR-DEPOSITION
6
Density functional theory
6
TEMPERATURE
6
ADSORPTION
5
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Date Issued
2023
4
2022
10
2021
16
2020
14
2019
26
2018
22
2017
5
Type
Article
97
Language
English
81
Korean
3
Journal
Chemistry of Materials
13
Applied Surface Science
10
한국반도체학술대회
8
Journal of Physical Chemistry C
6
Ceramics International
4
ACS Applied Materials and Interfaces
3
한국화학공학회 학술대회 초록집
3
ACS Nano
2
ACS National Meeting Book of Abst...
2
ALD 2018
2
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