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스퍼터링 및 전기도금법으로 증착된 Cu 박막의 두께에 따른 어닝링 집합조직Texture Evolution According to the Film Thickness of Annealed Cu Films Depositedby Sputtering and Electro-deposition
- Other Titles
- Texture Evolution According to the Film Thickness of Annealed Cu Films Depositedby Sputtering and Electro-deposition
- Issue Date
- 2006
- Publisher
- 대한금속·재료학회
- Citation
- 대한금속·재료학회지, v.44, no.8, pp 556 - 561
- Pages
- 6
- Journal Title
- 대한금속·재료학회지
- Volume
- 44
- Number
- 8
- Start Page
- 556
- End Page
- 561
- ISSN
- 1738-8228
2288-8241
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- There are no files associated with this item.
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Collections - Department of Materials Science and Engineering > 1. Journal Articles
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