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가상모드 입력성형기를 이용한 위치결정 스테이지 잔류진동 저감Residual Vibration Reduction of Precise Positioning Stage Using Virtual-Mode Based Input Shapers
- Other Titles
- Residual Vibration Reduction of Precise Positioning Stage Using Virtual-Mode Based Input Shapers
- Issue Date
- 2009
- Publisher
- 한국생산제조학회
- Keywords
- Input Shaping(입력성형기); Duration Time(지속시간); Virtual-Mode Input Shaper(가상모드 입력성형기); Response Time(응답시간); Precise Positioning Stage(정밀 위치결정 스테이지); Rise Time(상승시간)
- Citation
- 한국생산제조학회지, v.16, no.3, pp 255 - 260
- Pages
- 6
- Journal Title
- 한국생산제조학회지
- Volume
- 16
- Number
- 3
- Start Page
- 255
- End Page
- 260
- ISSN
- 2508-5093
2508-5107
- Abstract
- This paper presents an experimental result of virtual mode input shaping for positioning stage. Input shaping is liable to increase the rise time of the system, which often degrades the performance of system. The virtual mode input shaping is an input shaper design method to improve this problem. Experiments are performed with a precise positioning stage with a flexible beam of which natural frequency is adjustable. The experimental results show that the virtual-mode input shaper is useful to reduce the rise time as well as the residual vibration of precise positioning stages.
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