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화학기상증착법에 의한 탄소나노튜브의 성장에 미치는 암모니아 가스의 영향Effect of Ammonia Gas on Growth of Chemically Vapor-Deposited Carbon Nanotubes

Other Titles
Effect of Ammonia Gas on Growth of Chemically Vapor-Deposited Carbon Nanotubes
Authors
이동구
Issue Date
2010
Publisher
한국전기전자재료학회
Keywords
Ammonia; Carbon nanotube; Catalytic CVD; Fe catalyst; Ammonia; Carbon nanotube; Catalytic CVD; Fe catalyst
Citation
전기전자재료학회논문지, v.23, no.5, pp 418 - 423
Pages
6
Journal Title
전기전자재료학회논문지
Volume
23
Number
5
Start Page
418
End Page
423
URI
https://scholarworks.bwise.kr/kumoh/handle/2020.sw.kumoh/23031
ISSN
1226-7945
Abstract
Carbon nanotubes (CNTs) were synthesized by Fe-catalytic chemical vapor deposition (CVD) method about 800oC. The influence of process parameters such as pretreatment conditions, gas flow ratio, processing time, etc on the growth of CNTs was investigated by field emission scanning electron microscopy, transmission electron microscopy, and Raman spectroscopy. Ammonia was added to acetylene source gas before and during the CNT growth. Different types of CNTs formed depending upon the processing condition. It was found that ammonia prevented amorphous carbons from adsorbing to the outer wall of CNT, resulting in purification of CNTs during CNT growth.
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