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2축 이송계 정밀도 측정을 위한 레이저 간섭계 4축 자동정렬장치 개발
- Authors
- Hong, Seong-Wook
- Issue Date
- Sep-2000
- Publisher
- 한국정밀공학회지
- Citation
- 한국정밀공학회지, v.17, no.9(114)
- Journal Title
- 한국정밀공학회지
- Volume
- 17
- Number
- 9(114)
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Collections - School of Mechanical System Engineering > 1. Journal Articles
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