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Texture Evolution in TiN, TaN and W₂N Thin FilmsTexture Evolution in TiN, TaN and W₂N Thin Films
- Other Titles
- Texture Evolution in TiN, TaN and W₂N Thin Films
- Authors
- Kim, In-Soo
- Issue Date
- Aug-2002
- Publisher
- Trans Tech Publications, Switzerland
- Citation
- Materials Science Forum, v.408-412, pp 1591 - 1596
- Pages
- 6
- Journal Title
- Materials Science Forum
- Volume
- 408-412
- Start Page
- 1591
- End Page
- 1596
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- There are no files associated with this item.
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Collections - Department of Materials Science and Engineering > 1. Journal Articles
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