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Polymer filling behaviors with various levels of imprinting velocity in nanoimprintkng lithographyPolymer filling behaviors with various levels of imprinting velocity in nanoimprintkng lithography
- Other Titles
- Polymer filling behaviors with various levels of imprinting velocity in nanoimprintkng lithography
- Authors
- 채석
- Issue Date
- Dec-2013
- Publisher
- Elsevier B. V.
- Citation
- Microelectronic Engineering, v.117, no.0, pp 67 - 71
- Pages
- 5
- Journal Title
- Microelectronic Engineering
- Volume
- 117
- Number
- 0
- Start Page
- 67
- End Page
- 71
- ISSN
- 0167-9317
1873-5568
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- There are no files associated with this item.
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Collections - School of Electronic Engineering > 1. Journal Articles
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