Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Journal Title
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
ISSN
- E 2166-2746 | P 1071-1023
Publisher
- American Institute of Physics
Listed on(Coverage)
| JCR | 1997-2019 |
|---|---|
| SCI | 2010-2019 |
| SCIE | 2010-2021 |
| CC | 2016-2021 |
| SCOPUS | 2017-2020 |
Active
- Inactive
Country
- USA