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Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Journal Title
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
ISSN
E
2166-2746 |
P
1071-1023
Publisher
American Institute of Physics
Listed on
(Coverage)
JCR
1997-2019
SCI
2010-2019
SCIE
2010-2021
CC
2016-2021
SCOPUS
2017-2020
Active
Inactive
Country
USA
Article List
1 - 1 out of 1 results.
Effects of arsenic implantation and rapid thermal annealing on ZnO nanorods for p-type doping
Choi, Jinseok;
An, Sung Jin
Article
Issue Date
2020
Citation
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, v.38, no.5
Publisher
A V S AMER INST PHYSICS
1
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