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FT-IR/ATR을 이용한 실리콘 웨이퍼 기판 위의 Polydimethysiloxane의 분석 연구
- Authors
- 유근걸
- Issue Date
- Aug-2014
- Publisher
- 순천향대학교
- Keywords
- FT-IR ATR 실리콘 웨이퍼 Polydimethylsiloxane 분석
- Citation
- 순천향산업기술연구소논문지, v.20, no.1, pp.59 - 62
- Journal Title
- 순천향산업기술연구소논문지
- Volume
- 20
- Number
- 1
- Start Page
- 59
- End Page
- 62
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