Kim, T.[Kim, T.]; Han, Y.[Han, Y.]; Le, H.K.[Le, H.K.]; Shim, J.[Shim, J.]; Yang, K.[Yang, K.]; Bae, B.[Bae, B.]; Kim, S.[Kim, S.]
ArticleIssue Date2021CitationJournal of Semiconductor Technology and Science, v.21, no.5, pp.311 - 321PublisherInstitute of Electronics Engineers of Korea