Lee, I[Lee, Inhee]; Bang, S[Bang, Suyoung]; Kim, Y[Kim, Yejoong]; Kim, G[Kim, Gyouho]; Sylvester, D[Sylvester, Dennis]; Blaauw, D[Blaauw, David]; Lee, Y[Lee, Yoonmyung]
ArticleIssue Date2017CitationJOURNAL OF SEMICONDUCTOR TECHNOLOGY AND SCIENCE, v.17, no.4, pp.524 - 533PublisherIEEK PUBLICATION CENTER