Park, HG[Park, Hyung-Gu]; Kim, H[Kim, Hongjin]; Lee, DS[Lee, Dong-Soo]; Yu, CZ[Yu, Chang-Zhi]; Ku, H[Ku, Hyunchul]; Lee, KY[Lee, Kang-Yoon]
ArticleIssue Date2013CitationJOURNAL OF SEMICONDUCTOR TECHNOLOGY AND SCIENCE, v.13, no.4, pp.272 - 281PublisherIEEK PUBLICATION CENTER