Pham, DP[Duy Phong Pham]; Park, J[Park, Jinjoo]; Shin, C[Shin, Chonghoon]; Kim, S[Kim, Sangho]; Nam, Y[Nam, Yonghyun]; Kim, G[Kim, Geunho]; Kim, M[Kim, Minsik]; Yi, J[Yi, Junsin]
ArticleIssue Date2018CitationMATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING, v.74, pp.165 - 169PublisherELSEVIER SCI LTD