Choi, S.S.[Choi, S.S.]; Oh, S.-J.[ Oh, S.-J.]; Han, C.H.[ Han, C.H.]; Park, D.J.[ Park, D.J.]; Choi, S.B.[ Choi, S.B.]; Kim, Y.-S.[Kim, Y.-S.]; Park, N.K.[ Park, N.K.]
ArticleIssue Date2017CitationJOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, v.35, no.4PublisherA V S AMER INST PHYSICS