솔벤트 증기를 이용한 폴리머 마이크로 렌즈의 표면 연마Surface Polishing of Polymer Microlens with Solvent Vapor
- Other Titles
- Surface Polishing of Polymer Microlens with Solvent Vapor
- Authors
- 김신형; 조영학; 송준엽; 이평안; 김보현; 오영탁
- Issue Date
- Jun-2013
- Publisher
- 한국정밀공학회
- Keywords
- Microlens (마이크로렌즈); Micro-EDM (마이크로 방전가공); Hot-embossing (핫엠보싱 공정); Solvent vapor polishing (솔벤트 증기 연마)
- Citation
- 한국정밀공학회지, v.30, no.6, pp.644 - 649
- Journal Title
- 한국정밀공학회지
- Volume
- 30
- Number
- 6
- Start Page
- 644
- End Page
- 649
- URI
- http://scholarworks.bwise.kr/ssu/handle/2018.sw.ssu/12005
- ISSN
- 1225-9071
- Abstract
- Today, there are lots of progresses in the field of lens researches, especially in the microlens fabrication. Unlike normal lenses, microlens has been widely used as a role of improving the performance of photonic devices which increase the optical precision, and also used in the fields of the display. In this paper, polymer microlenses with 300 μm diameter were replicated through hot-embossing from nickel mold which was fabricated by micro-EDM. After hot-embossing process, the polymer microlenses have a rough surface due to the crater formed by micro-EDM process, which is projected onto the surface of the lenses. The surface of polymer microlenses was polished using solvent vapor to improve the surface roughness of the microlenses without changing their shape. In the experiment, the surface roughness was improved with the processing time and vapor temperature. Also, the roughness improvement was greatly affected by the solubility difference between polymer and solvent.
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