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실리콘이 함유되어 있는 Polynorbornenes의 EUV용 포토레지스트로의 응용
- Authors
- 곽영제
- Issue Date
- Oct-2005
- Publisher
- 한국섬유공학회
- Citation
- 한국섬유공학회학술발표회, v.38, no.2, pp.197 - 198
- Conference Name
- 한국섬유공학회학술발표회
- Place
- KO
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Related Researcher
- Kwark, Young Je
- College of Engineering (Department of Materials Science and Engineering)