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In-Situ Synchrotron X-Ray Scattering Study of Thin Film Growth by Atomic Layer Deposition

Authors
Park, Yong JunLee, Dong RyeolLee, Hyun HwiLee, Han-Bo-RamKim, HyungjunPark, Gye-ChoonRhee, Shi-WooBaik, Sunggi
Issue Date
Feb-2011
Publisher
AMER SCIENTIFIC PUBLISHERS
Citation
, v.11, no.2, pp.1577 - 1580
URI
http://scholarworks.bwise.kr/ssu/handle/2018.sw.ssu/33129
DOI
10.1166/jnn.2011.3399
Conference Name
Journal of Nanoscience and Nanotechnology
Place
US
ISSN
1533-4880
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