Bio-inspired dry adhesive pads using multi-walled carbon nanotube/polydimethylsiloxane composites for efficient wafer transfer robot arms in smart factories
- Authors
- Lee, Bom; Ko, Young Chun; Kim, Simon; Lee, Su Eon; Jin, Ho Jun; Chang, Dong Joon; Park, Min-Ho; Kim, Bong Hoon
- Issue Date
- Nov-2023
- Publisher
- ROYAL SOC CHEMISTRY
- Citation
- MOLECULAR SYSTEMS DESIGN & ENGINEERING, v.8, no.12, pp 1520 - 1525
- Pages
- 6
- Journal Title
- MOLECULAR SYSTEMS DESIGN & ENGINEERING
- Volume
- 8
- Number
- 12
- Start Page
- 1520
- End Page
- 1525
- URI
- https://scholarworks.bwise.kr/ssu/handle/2018.sw.ssu/49063
- DOI
- 10.1039/d3me00126a
- ISSN
- 2058-9689
- Abstract
- The development of dry adhesive pads (DAPs) is essential to prevent wafer detachment from high-speed wafer-transfer robot arms. However, polydimethylsiloxane (PDMS)-based DAPs, which are insulating elastomers, generate residual charges inside DAPs. These cause charge accumulation and electrostatic interactions between the DAP and the wafer interface. Furthermore, at a high processing temperature of >300 degrees C, the adhesive and mechanical strengths of conventional DAPs are degraded because of their low thermal and mechanical stability. In this study, we developed bio-inspired DAPs (BDAPs) with various shapes (hole, cylinder, and line patterns) and different contact areas (20, 40, and 60%) through systematic investigations to determine optimized patterns and shapes for different motions. Additionally, we fabricated a multi-walled carbon nanotube (MWCNT)/PDMS composite-based BDAP (c-BDAP), which exhibited high heat resistance and high electrical conductivity. The conductivity of c-BDAP was 6.16 x 10(-3) S m(-1), and it had a weight loss of similar to 4% at 300 degrees C after 1 h. Our findings can inspire the development of low-cost and high-performance c-BDAPs, which are reliable for various robot arm movements.
- Files in This Item
-
Go to Link
- Appears in
Collections - ETC > 1. Journal Articles
![qrcode](https://api.qrserver.com/v1/create-qr-code/?size=55x55&data=https://scholarworks.bwise.kr/ssu/handle/2018.sw.ssu/49063)
Items in ScholarWorks are protected by copyright, with all rights reserved, unless otherwise indicated.