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Post-annealing effect on the optical property of indium tin oxide sputtered films

Authors
Noh, MiruLee, Y. S.Park, JunghyunChung, J. S.Yang, Jin KukKo, B. W.Kim, Ji WoongPark, SungkyunKim, Hyuk JinChang, Young Jun
Issue Date
Dec-2016
Publisher
ELSEVIER SCIENCE BV
Keywords
Indium tin oxide; Excimer laser annealing; Sputtering; Spectroscopic ellipsometry
Citation
CURRENT APPLIED PHYSICS, v.16, no.12, pp.1576 - 1580
Journal Title
CURRENT APPLIED PHYSICS
Volume
16
Number
12
Start Page
1576
End Page
1580
URI
http://scholarworks.bwise.kr/ssu/handle/2018.sw.ssu/5526
DOI
10.1016/j.cap.2016.09.010
ISSN
1567-1739
Abstract
By using the spectroscopic ellipsometric technique, we investigated the excimer laser annealing (ELA) effect on the electronic properties of indium tin oxides (ITO) films fabricated by the DC-sputtering method, which is the one of the most commonly known methods for the commercial ITO films. We found that while the ELA process was helpful for enhancing the electronic property of the sputtered films, the degree of the enhancement was not so sizable as the case of the sol-gel films. This result appeared to originate from the difference in the physical properties of the sol-gel and sputtered amorphous films. We also examined the thermal annealing (TA) effect on the sputtered amorphous films in various ambient conditions, and compared their physical properties with those of the TA sol-gel films. (C) 2016 Elsevier B.V. All rights reserved.
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College of Natural Sciences > ETC > 1. Journal Articles
College of Natural Sciences > Department of Chemistry > 1. Journal Articles
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