Micro-structuring of glass with features less than 100 mu m by electrochemical discharge machining
DC Field | Value | Language |
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dc.contributor.author | 김보현 | - |
dc.contributor.author | X. D. CAO | - |
dc.contributor.author | C. N. CHU | - |
dc.date.available | 2018-05-08T04:45:45Z | - |
dc.date.created | 2018-04-18 | - |
dc.date.issued | 2009 | - |
dc.identifier.issn | 0141-6359 | - |
dc.identifier.uri | http://scholarworks.bwise.kr/ssu/handle/2018.sw.ssu/6041 | - |
dc.description.abstract | Micro-electrochemical discharge machining (ECDM) was studied in order to improve the machining of 3D micro-structures of glass. To minimize structures and obtain good surface microstructures, the effects of the electrolyte, the pulse on/off-time ratio, the voltage, the feedrate, the rotational speed, and the electrolyte concentration in the drilling and milling processes were studied. In ECDM, voltage is applied to generate a gas film and sparks on a tool electrode; however, high voltage produces poor machining resolution. To obtain a stable gas film over the whole surface of the tool at a low voltage, a new mechanical contact detector, based on a loadcell, was used; the immersion depth of the tool electrode in the electrolyte was reduced as much as possible. In this study, various micro-structures less than 100 mu m in size, such as circle divide 60 mu m micro-holes, a 10 mu m-thin wall, and a 3D micro-structure were fabricated to demonstrate the potential for micro-machining of glass by ECDM. (C) 2009 Elsevier Inc. All rights reserved. | - |
dc.language | 영어 | - |
dc.language.iso | en | - |
dc.publisher | ELSEVIER SCIENCE INC | - |
dc.relation.isPartOf | PRECIS ENG | - |
dc.title | Micro-structuring of glass with features less than 100 mu m by electrochemical discharge machining | - |
dc.type | Article | - |
dc.identifier.doi | 10.1016/j.precisioneng.2009.01.001 | - |
dc.type.rims | ART | - |
dc.identifier.bibliographicCitation | PRECIS ENG, v.33, no.4, pp.459 - 465 | - |
dc.description.journalClass | 1 | - |
dc.identifier.wosid | 000269105900018 | - |
dc.identifier.scopusid | 2-s2.0-67650433328 | - |
dc.citation.endPage | 465 | - |
dc.citation.number | 4 | - |
dc.citation.startPage | 459 | - |
dc.citation.title | PRECIS ENG | - |
dc.citation.volume | 33 | - |
dc.contributor.affiliatedAuthor | 김보현 | - |
dc.type.docType | Article | - |
dc.description.isOpenAccess | N | - |
dc.description.journalRegisteredClass | scopus | - |
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