Dynamic Analysis and Iterative Design of a Passive Reaction Force Compensation Device for a Linear Motor Motion Stage

Abstract

Acceleration and deceleration of a mover excites vibration of the system base so as to reduce life as well as productivity of manufacturing equipment. Vibration of the system base of a linear motor motion stage can be significantly reduced with reaction force compensation (RFC) mechanisms. However, transmitted force to the system base is minimized without considering dynamics of the system base in the previous research. In this paper, dynamic analysis of the RFC system with a movable magnet track is performed considering dynamics of its system base. Furthermore, we propose an iterative design procedure for the linear motor motion stage to minimize the vibration of the system base. First, a 5 DOF dynamic model of RFC mechanism including the system base and the mover is derived and its dynamic characteristic is investigated In addition, dynamic responses of the linear motor motion stage to both long and short stroke motions are analyzed with simulations. Secondly, an iterative design procedure of the RFC mechanism for given input motion profiles is proposed to minimize the vibration of the system base. The proposed design procedure consists of two main steps: RFC design and the system base design. Finally, effectiveness of the proposed design is verified with simulations.