High Performance p-type SnO thin-film Transistor with SiOx Gate Insulator Deposited by Low-Temperature PECVD Method
DC Field | Value | Language |
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dc.contributor.author | Myeonghun, U. | - |
dc.contributor.author | Han, Young-Joon | - |
dc.contributor.author | Song, Sang-Hun | - |
dc.contributor.author | Cho, In-Tak | - |
dc.contributor.author | Lee, Jong-Ho | - |
dc.contributor.author | Kwon, Hyuck-In | - |
dc.date.available | 2019-03-08T21:00:41Z | - |
dc.date.issued | 2014-10 | - |
dc.identifier.issn | 1598-1657 | - |
dc.identifier.issn | 2233-4866 | - |
dc.identifier.uri | https://scholarworks.bwise.kr/cau/handle/2019.sw.cau/11796 | - |
dc.description.abstract | We have investigated the gate insulator effects on the electrical performance of p-type tin monoxide (SnO) thin-film transistors (TFTs). Various SnO TFTs are fabricated with different gate insulators of a thermal SiO2, a plasma-enhanced chemical vapor deposition (PECVD) SiNx, a 150 degrees C-deposited PEVCD SiOx, and a 300 degrees C-deposited PECVD SiOx. Among the devices, the one with the 150 degrees C-deposited PEVCD SiOx exhibits the best electrical performance including a high field-effect mobility (=4.86 cm(2)/Vs), a small subthreshold swing (=0.7 V/decade), and a turn-on voltage around 0 (V). Based on the X-ray diffraction data and the localized-trap-states model, the reduced carrier concentration and the increased carrier mobility due to the small grain size of the SnO thin-film are considered as possible mechanisms, resulting in its high electrical performance. | - |
dc.format.extent | 7 | - |
dc.language | 영어 | - |
dc.language.iso | ENG | - |
dc.publisher | IEEK PUBLICATION CENTER | - |
dc.title | High Performance p-type SnO thin-film Transistor with SiOx Gate Insulator Deposited by Low-Temperature PECVD Method | - |
dc.type | Article | - |
dc.identifier.doi | 10.5573/JSTS.2014.14.5.666 | - |
dc.identifier.bibliographicCitation | JOURNAL OF SEMICONDUCTOR TECHNOLOGY AND SCIENCE, v.14, no.5, pp 666 - 672 | - |
dc.identifier.kciid | ART001923696 | - |
dc.description.isOpenAccess | N | - |
dc.identifier.wosid | 000346137400023 | - |
dc.identifier.scopusid | 2-s2.0-84908324623 | - |
dc.citation.endPage | 672 | - |
dc.citation.number | 5 | - |
dc.citation.startPage | 666 | - |
dc.citation.title | JOURNAL OF SEMICONDUCTOR TECHNOLOGY AND SCIENCE | - |
dc.citation.volume | 14 | - |
dc.type.docType | Article | - |
dc.publisher.location | 대한민국 | - |
dc.subject.keywordAuthor | P-type SnO TFTs | - |
dc.subject.keywordAuthor | gate insulator | - |
dc.subject.keywordAuthor | PECVD SiOx | - |
dc.subject.keywordAuthor | localized-trap-states model | - |
dc.subject.keywordPlus | POLYCRYSTALLINE SILICON FILMS | - |
dc.subject.keywordPlus | CHEMICAL-VAPOR-DEPOSITION | - |
dc.subject.keywordPlus | ELECTRICAL-PROPERTIES | - |
dc.subject.keywordPlus | PHASE | - |
dc.subject.keywordPlus | ROUGHNESS | - |
dc.subject.keywordPlus | DIOXIDE | - |
dc.relation.journalResearchArea | Engineering | - |
dc.relation.journalResearchArea | Physics | - |
dc.relation.journalWebOfScienceCategory | Engineering, Electrical & Electronic | - |
dc.relation.journalWebOfScienceCategory | Physics, Applied | - |
dc.description.journalRegisteredClass | scie | - |
dc.description.journalRegisteredClass | scopus | - |
dc.description.journalRegisteredClass | kci | - |
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