Lateral Nanoelectromechanical Relays for Reconfigurable Logic
- Authors
- Choi, Woo Young; Kwon, Hyuck-In; Kim, Kwanyong
- Issue Date
- Dec-2017
- Publisher
- AMER SCIENTIFIC PUBLISHERS
- Keywords
- Nanoelectromechanical (NEM) Relay; Reconfigurable Logic
- Citation
- JOURNAL OF NANOELECTRONICS AND OPTOELECTRONICS, v.12, no.12, pp 1402 - 1405
- Pages
- 4
- Journal Title
- JOURNAL OF NANOELECTRONICS AND OPTOELECTRONICS
- Volume
- 12
- Number
- 12
- Start Page
- 1402
- End Page
- 1405
- URI
- https://scholarworks.bwise.kr/cau/handle/2019.sw.cau/1590
- DOI
- 10.1166/jno.2017.2113
- ISSN
- 1555-130X
1555-1318
- Abstract
- This study proposes novel structures and a novel process for lateral nanoelectromechanical (NEM) relays and experimentally verifies their performance. Lateral NEM relays have a simpler fabrication process and better integration than vertical NEM relays because the latter require multiple metal layers while the former require only one metal layer. Thus, lateral NEM relays integrated over CMOS logic blocks are more advantageous compared to vertical NEM relays for reconfigurable logic applications.
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Collections - College of ICT Engineering > School of Electrical and Electronics Engineering > 1. Journal Articles
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