Enhancing the thermoelectric properties of super-lattice Al2O3/ZnO atomic film via interface confinement
- Authors
- Lee, Jung-Hoon; Park, Tae-Hyun; Lee, Seung-Hwan; Park, No-Won; Lee, Won Yong; Lim, Jun-Hyung; Lee, Sang-Kwon; Park, Jin-Seong
- Issue Date
- Oct-2016
- Publisher
- ELSEVIER SCI LTD
- Keywords
- Superlattice; Nanolaminate; Thermoelectric; Atomic layer deposition (ALD); Aluminium doped-ZnO(AZO); Quantum confinement effect
- Citation
- CERAMICS INTERNATIONAL, v.42, no.13, pp 14411 - 14415
- Pages
- 5
- Journal Title
- CERAMICS INTERNATIONAL
- Volume
- 42
- Number
- 13
- Start Page
- 14411
- End Page
- 14415
- URI
- https://scholarworks.bwise.kr/cau/handle/2019.sw.cau/1702
- DOI
- 10.1016/j.ceramint.2016.06.032
- ISSN
- 0272-8842
1873-3956
- Abstract
- Aluminum oxide (Al2O3)/zinc oxide (ZnO) thin films deposited via atomic layer deposition (ALD) are demonstrated to enhance their thermoelectric properties by manipulating them with a nano-thick Al2O3 interface. The overall superlattice structure is tuned by varying the ZnO ALD sequence and the Al2O3 ALD sequence while maintaining the same composition. An aluminum-doped zinc oxide (AZO) thin film is deposited at 250 degrees C, and the Al2O3 thickness in the superlattice is gradually increased from 0.13 nm to 1.23 nm. The total film composition is fixed at 2% AZO. We observe that an efficient superlattice structure is made with a specific Al2O3 thickness. The thermal conductivity is significantly decreased from 0.57 W/mK to 0.26 W/mK as the thickness of the Al2O3 layer is increased. Additionally, the absolute Seebeck coefficient is increased from 14 mu V/K to 65 mu V/K. This may be caused by the interface confinement effect and interface scattering between the ZnO layer and the Al2O3 layer. The figure of merit ZT value is 0.14 for the most efficient structure. (C) 2016 Elsevier Ltd and Techna Group S.r.l. All rights reserved.
- Files in This Item
- There are no files associated with this item.
- Appears in
Collections - College of Natural Sciences > Department of Physics > 1. Journal Articles
![qrcode](https://api.qrserver.com/v1/create-qr-code/?size=55x55&data=https://scholarworks.bwise.kr/cau/handle/2019.sw.cau/1702)
Items in ScholarWorks are protected by copyright, with all rights reserved, unless otherwise indicated.