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Performance of RF MEMS switches at low temperatures

Authors
Su, H.T.Llamas-Garro, I.Lancaster, M.J.Prest, M.Park, J.-H.Kim, J.-M.Baek, C.-W.Kim, Y.-K.
Issue Date
2006
Citation
Electronics Letters, v.42, no.21, pp 1219 - 1221
Pages
3
Journal Title
Electronics Letters
Volume
42
Number
21
Start Page
1219
End Page
1221
URI
https://scholarworks.bwise.kr/cau/handle/2019.sw.cau/25581
DOI
10.1049/el:20062551
ISSN
0013-5194
1350-911X
Abstract
The actuation voltage of microelectromechanical system (MEMS) metal switches was investigated at temperatures ranging from 10 to 290K. The investigation shows a 50 increase in the actuation voltage at low temperature. A comparison has been made using a published model and showed similar increment of actuation voltage at low temperature. © The Institution of Engineering and Technology 2006.
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창의ICT공과대학 (전자전기공학부)
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