Enhanced Electrical Properties of Platinum Spotted AZO/PET Thin Films Prepared by Sol-Gel Process

Abstract

Recently, many researches on Al-doped ZnO (AZO) thin film based transparent conducting oxide (TCO) have been intensively investigated for the electronic and display device applications. In this study, AZO thin films with different thicknesses were deposited on polyethylene terephthalate (PET) substrates by sol-gel spin coating at a relatively low temperature. By optimizing the AZO thickness, maximum figure of merit (FOM) values were investigated and discussed. Commonly, PET substrates are used in the fabrication of flexible display devices. However, because of the low melting temperature of the PET substrate (similar to 200 degrees C), AZO thin films spin-coated on PET substrates cannot be subjected to crystallization at high temperatures. Therefore, alternative advanced optical annealing method was considered to crystalize the AZO thin films on the PET substrates. In this experiment, optical annealing method will be proposed. To increase electrical conductivity, Platinum (Pt) dots were sprayed on the AZO sample to improve the electric conductivity. The Pt-spotted AZO thin films on flexible PET substrates prepared by sputtering exhibited high electrical conductivities and high optical transmittances. The 0.63 nm-thick Pt/AZO/PET film exhibited a transmittance of 80% in the 380-800 nm range and the 3.78 nm-thick Pt/AZO/PET film exhibited a resistivity of 5.61 x 10(-4) Omega.m. Notably, the 159 nm-thick Pt/AZO/PET film exhibited an FOM of 156. Moreover, the sheet resistances and transmittances of the prepared AZO/PET films were determined.