Ku-band bandpass filters using novel micromachined substrate integrated waveguide structure with embedded silicon vias in benzocyclobutene dielectrics
- Authors
- Hyeon, Ik-Jae; Park, Woo-Young; Lim, Sungjoon; Baek, Chang-Wook
- Issue Date
- Dec-2012
- Publisher
- ELSEVIER SCIENCE SA
- Keywords
- Substrate integrated waveguide (SIW); Bandpass filter (BPF); Complementary split-ring resonators (CSRRs); Micromachining process
- Citation
- SENSORS AND ACTUATORS A-PHYSICAL, v.188, pp 463 - 470
- Pages
- 8
- Journal Title
- SENSORS AND ACTUATORS A-PHYSICAL
- Volume
- 188
- Start Page
- 463
- End Page
- 470
- URI
- https://scholarworks.bwise.kr/cau/handle/2019.sw.cau/37189
- DOI
- 10.1016/j.sna.2012.02.012
- ISSN
- 0924-4247
- Abstract
- In this paper, Ku-band bandpass filters (BPFs) based on a novel micromachined substrate integrated waveguide (SIW) platform with square complementary split-ring resonators (CSRRs) have been demonstrated. The proposed SIW platform adopts embedded metal-coated silicon vias in benzocyclobutene (BCB) dielectric substrate filled into a silicon trench. Unlike conventional SIW BPFs using classical microwave substrates, the proposed BPFs can be integrated with silicon-based circuits or RF MEMS devices since the fabrication process is fully compatible with the silicon process while providing low-loss properties of the waveguide. Three types of BPFs using CPW and microstrip feeding configurations have been designed and fabricated. The microstrip-fed BPF using the same CSRRs shows an improved insertion loss of 1.39 dB at 13.8 GHz with reduced device size compared to the CPW-fed BPF which has an insertion loss of 2.27 dB at 14.1 GHz. The microstrip-fed BPF with different CSRR configurations designed to improve shape factor shows an attenuation factor of 124 dB/GHz, with an insertion loss of 2.3 dB at 21.2 GHz. (C) 2012 Elsevier B.V. All rights reserved.
- Files in This Item
- There are no files associated with this item.
- Appears in
Collections - College of ICT Engineering > School of Electrical and Electronics Engineering > 1. Journal Articles
![qrcode](https://api.qrserver.com/v1/create-qr-code/?size=55x55&data=https://scholarworks.bwise.kr/cau/handle/2019.sw.cau/37189)
Items in ScholarWorks are protected by copyright, with all rights reserved, unless otherwise indicated.