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Surface Etching of TiO2 Thin Films Using High Density Cl-2/Ar Plasma
Woo, Jong-Chang; Joo, Young-Hee;
Kim, Chang-Il
Article
Issue Date
2015
Citation
TRANSACTIONS ON ELECTRICAL AND ELECTRONIC MATERIALS, v.16, no.6, pp 346 - 350
Publisher
KOREAN INST ELECTRICAL & ELECTRONIC MATERIAL ENGINEERS
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Joo, Young-Hee
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Woo, Jong-Chang
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High density plasma
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INDUCTIVELY-COUPLED PLASMA
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TiO2
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Article
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ENG
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TRANSACTIONS ON ELECTRICAL AND EL...
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