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Dry etch properties of IZO thin films in a CF4/Ar adaptively coupled plasma system
Woo, Jong-Chang;
Kim, Chang-Il
Article
Issue Date
2012
Citation
VACUUM, v.86, no.9, pp 1336 - 1340
Publisher
PERGAMON-ELSEVIER SCIENCE LTD
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Kim, Chang Il
1
Woo, Jong-Chang
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CL-2/AR
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DEVICES
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Field emission Auger electron spe...
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Indium zinc oxide
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2012
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