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Experimental Investigation of Physical Mechanism for Asymmetrical Degradation in Amorphous InGaZnO Thin-film Transistors under Simultaneous Gate and Drain Bias Stresses

Authors
Jeong, Chan-YongKim, Hee-JoongLee, Jeong-HwanKwon, Hyuck-In
Issue Date
Apr-2017
Publisher
IEEK PUBLICATION CENTER
Keywords
A-IGZO TFT; simultaneous gate and drain bias stresses; asymmetrical degradation; horizontal electric field
Citation
JOURNAL OF SEMICONDUCTOR TECHNOLOGY AND SCIENCE, v.17, no.2, pp 239 - 244
Pages
6
Journal Title
JOURNAL OF SEMICONDUCTOR TECHNOLOGY AND SCIENCE
Volume
17
Number
2
Start Page
239
End Page
244
URI
https://scholarworks.bwise.kr/cau/handle/2019.sw.cau/4662
DOI
10.5573/JSTS.2017.17.2.239
ISSN
1598-1657
2233-4866
Abstract
We experimentally investigate the physical mechanism for asymmetrical degradation in amorphous indium-gallium-zinc oxide (a-IGZO) thinfilm transistors (TFTs) under simultaneous gate and drain bias stresses. The transfer curves exhibit an asymmetrical negative shift after the application of gate-to-source (VGS) and drain-to-source (VDS) bias stresses of (VGS = 24 V, VDS = 15.9 V) and (VGS = 22 V, VDS = 20 V), but the asymmetrical degradation is more significant after the bias stress (VGS, VDS) of (22 V, 20 V) nevertheless the vertical electric field at the source is higher under the bias stress (VGS, VDS) of (24 V, 15.9 V) than (22 V, 20 V). By using the modified external load resistance method, we extract the source contact resistance (RS) and the voltage drop at RS (VS, drop) in the fabricated a-IGZO TFT under both bias stresses. A significantly higher RS and VS, drop are extracted under the bias stress (VGS, VDS) of (22 V, 20V) than (24 V, 15.9 V), which implies that the high horizontal electric field across the source contact due to the large voltage drop at the reverse biased Schottky junction is the dominant physical mechanism causing the asymmetrical degradation of a-IGZO TFTs under simultaneous gate and drain bias stresses.
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창의ICT공과대학 (전자전기공학부)
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