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Flexible metal-insulator-metal (MIM) devices for plastic film AM-LCD

Authors
Hong, S.J.Lee, C.J.Han, J.I.Kim, W.K.Moon, D.G.Kwak, M.G.Park, Sung KyuKim, Y.H.
Issue Date
Jun-2002
Publisher
ELSEVIER SCIENCE BV
Keywords
MIM; flexible electrode; symmetry; I-V characteristics; etch-free process
Citation
CURRENT APPLIED PHYSICS, v.2, no.3, pp 245 - 248
Pages
4
Journal Title
CURRENT APPLIED PHYSICS
Volume
2
Number
3
Start Page
245
End Page
248
URI
https://scholarworks.bwise.kr/cau/handle/2019.sw.cau/51206
DOI
10.1016/S1567-1739(02)00099-8
ISSN
1567-1739
1878-1675
Abstract
We developed new flexible metal-insulator-metal (MIM) devices subject to plastic film substrate. The structure of the MINI device is that a Ta2O5 insulator is covered with two flexible Al electrodes on both sides. The flexible structure of the MIM device was successfully fabricated applying our own etch-free process. (C) 2002 Elsevier Science B.V. All rights reserved.
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창의ICT공과대학 (전자전기공학부)
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