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Fabrication of a 2.5 Gbps x 4 channel optical micro-module for O-PCB application

Authors
Lee, Hyun-ShikAn, ShinmoKim, YoungKim, Do-KyoonKang, Jin-KuChoi, Young-WanLee, Seung GolO, Beom HoanLee, El-Hang
Issue Date
Apr-2006
Publisher
ELSEVIER SCIENCE BV
Keywords
optical interconnection; photonic integrated circuit; micro-fabrication; UV embossing
Citation
MICROELECTRONIC ENGINEERING, v.83, no.4-9, pp 1347 - 1351
Pages
5
Journal Title
MICROELECTRONIC ENGINEERING
Volume
83
Number
4-9
Start Page
1347
End Page
1351
URI
https://scholarworks.bwise.kr/cau/handle/2019.sw.cau/52693
DOI
10.1016/j.mee.2006.01.118
ISSN
0167-9317
1873-5568
Abstract
We report on the fabrication of a polymer-based 2.5 Gbps x 4 channel optical interconnecting micro-module for optical printed circuit board (O-PCB) application. An optical waveguide array is used for optical transmission from vertical surface emitting laser (VCSEL) array to photodiode (PD) array and the built-in 45 degrees waveguide mirrors are used for vertical coupling. The optical waveguide array and the 45 degrees mirrors are fabricated by UV imprint process in one-step. We fabricate microlensed VCSELs by micro-inkjetting method, which reduced radiation angle of VCSEL from 18 degrees to 15 degrees for better light coupling. We use solder ball array and pin array for alignment between O-PCB and the electrical sub-boards with alignment mismatch below 10 mu m in x, y and z axis. The fabricated optical interconnection module transmits data at the rate of 2.5 Gbps per channel. (c) 2006 Elsevier B.V. All rights reserved.
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창의ICT공과대학 (전자전기공학부)
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