Biosensing characteristics of InAs nanowire transistors grown by MOCVD
- Authors
- Kim, Doo Gun; Hwang, Jeongwoo; Kim, Seon Hoon; Ki, Hyun Chul; Kim, Tae Un; Shin, Jae Cheol; Choi, Young Wan
- Issue Date
- Feb-2017
- Publisher
- SPIE-INT SOC OPTICAL ENGINEERING
- Keywords
- Nanowires; Field effect transistor; MOCVD; Biosensor; InAs
- Citation
- QUANTUM DOTS AND NANOSTRUCTURES: GROWTH, CHARACTERIZATION, AND MODELING XIV, v.10114
- Journal Title
- QUANTUM DOTS AND NANOSTRUCTURES: GROWTH, CHARACTERIZATION, AND MODELING XIV
- Volume
- 10114
- URI
- https://scholarworks.bwise.kr/cau/handle/2019.sw.cau/56552
- DOI
- 10.1117/12.2253637
- ISSN
- 0277-786X
1996-756X
- Abstract
- We demonstrated the ion-sensitive field-effect transistors (IS-FETs) based on nanowires (NWs) with different diameters and doping concentrations to obtain the high sensitivity and various applications. The growth of the catalyst-free InAs NWs was carried out using a horizontal reactor MOCVD system (AIXTRON Inc.). A p-type Si (111) wafer (rho = 1 - 10 Omega-cm) was prepared for the NW growth. Here, NWs with diameters of around 50 similar to 150 nm were grown and the doping concentration also was changed around x +/- 10(16 similar to 18)/cm(2). IS-FETs with the grown InAs NWs were fabricated using the photolithography and the lift-off process. The gas sensing characteristics have been investigated through studying the gate response of the NW conductance in different ambient conditions.
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