Double texturing of glass substrate and ZnO : Al transparent electrode surfaces for high performance thin film solar cells고성능 박막태양전지를 위한 유리 기판 및 산화 아연 투명 전극의 2중 구조 표면 조직화 공정 연구
- Authors
- Kang, Dong-Won
- Issue Date
- Aug-2017
- Publisher
- Korean Institute of Electrical Engineers
- Keywords
- Al-doped ZnO; Glass substrate; Reactive ion etching; Solar energy; Thin film solar cell
- Citation
- Transactions of the Korean Institute of Electrical Engineers, v.66, no.8, pp 1230 - 1235
- Pages
- 6
- Journal Title
- Transactions of the Korean Institute of Electrical Engineers
- Volume
- 66
- Number
- 8
- Start Page
- 1230
- End Page
- 1235
- URI
- https://scholarworks.bwise.kr/cau/handle/2019.sw.cau/74906
- DOI
- 10.5370/KIEE.2017.66.8.1230
- ISSN
- 1975-8359
2287-4364
- Abstract
- We studied surface texture-etching of glass substrate by using reactive ion etching process with various working pressure (0.7~9.0 mT). With the increase in the pressure, a haze parameter, which means diffusive transmittance/total transmittance, was increased in overall wavelength regions, as measured by spectrophotometer. Also, atomic force microscopy (AFM) study also showed that the surface topography transformed from V-shaped, keen surface to U-shaped, flattened surface, which is beneficial for nanocrystalline silicon semiconductor growth with suppressing defective crack formation. The texture-etched ZnO:Al combined with textured glass exhibited pronounced haze properties that showed 60~90 % in overall spectral wavelength regions. This promising optical properties of double textured, transparent conducting substrate can be widely applied in silicon thin film photovoltaics and other optoelectronic devices. Copyright © The Korean Institute of Electrical Engineers.
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