The Positive Gate Bias Annealing Method for the Suppression of a Leakage Current in the SPC-Si TFT on a Glass Substrate
- Authors
- Park, Sang-Geun; Park, Joong-Hyun; Kuk, Seung-Hee; Kang, Dong-Won; Han, Min-Koo
- Issue Date
- 2008
- Publisher
- MATERIALS RESEARCH SOCIETY
- Citation
- AMORPHOUS AND POLYCRYSTALLINE THIN-FILM SILICON SCIENCE AND TECHNOLOGY-2008, v.1066, pp 301 - 306
- Pages
- 6
- Journal Title
- AMORPHOUS AND POLYCRYSTALLINE THIN-FILM SILICON SCIENCE AND TECHNOLOGY-2008
- Volume
- 1066
- Start Page
- 301
- End Page
- 306
- URI
- https://scholarworks.bwise.kr/cau/handle/2019.sw.cau/74976
- DOI
- 10.1557/PROC-1066-A13-03
- ISSN
- 0272-9172
- Abstract
- We fabricated PMOS SPC-Si TFTs which show better current uniformity than ELA poly-Si TFTs and superior stability compare to a-Si:H TFT on a glass substrate employing alternating magnetic field crystallization. However the leakage current of SPC-Si TFT was rather high for circuit element of AMOLED display due to many grain boundaries which could be electron hole generation centers. We applied off-state bias annealing of V(GS)=5V, V(DS)=-20V in order to suppress the leakage current of SPC-Si TFT. When the off-state bias annealing was applied on the SPC-Si TFT, the electron carriers were trapped in the gate insulator by high gate-drain voltage (25V). The trapped electron carriers could reduce the gate-drain field, so that the leakage current of SPC-Si TFT was reduced after off-state bias annealing. We applied AC-bias stress on the gate node of SPC-Si TFT for 20,000 seconds in order to verify that the leakage current of SPC-Si TFT could be remained low at actual AMOLED display circuit after off-state bias annealing. The suppressed leakage current was not altered after AC-bias stress. The off-state bias annealed SPC-Si TFT could be used as pixel element of high quality AMOLED display.
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Collections - College of Engineering > School of Energy System Engineering > 1. Journal Articles
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