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Reevaluation of hydrogen gas dissolved cleaning solutions in single wafer megasonic cleaningGo to Link

Kang, Bong Kyun; Lee, Seung Ho; Kim, In Jung; Choi, Eun Suck; Kim, Bong Woo; Busnaina, Ahmed.A.; Hattori, Takeshi; Park, Jin-Goo

ArticleIssue Date2009CitationECS Transactions, v.25, no.5, pp 273 - 279PublisherElectrochemical Society, Inc.
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