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Browsing by Choi, HoomiAuthor

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Development of CO2 gas cluster cleaning method and its characterization Go to Link

Choi, Hoomi; Kim, Hojoong; Yoon, Deokjoo; Lee, Jong W.; Kang, Bong-Kyun; Kim, Min-Su; Park, Jin-Goo; Kwon, Soon-Bark; Kim, Taesung

ArticleIssue Date2013CitationMicroelectronic Engineering, v.102, pp 87 - 90PublisherElsevier BV

SCIESCOPUS

Nano gas cluster dry cleaning for damage free particle removal Go to Link

Kim, Min su; Kang, Bong Kyun; Lee, Seung Ho; Yoon, Deok joo; Choi, Hoomi; Kim, Ho joong; Kim, Tae sung; Park, Jin-Goo

ArticleIssue Date2011CitationECS Transactions, v.41, no.5, pp 229 - 236PublisherThe Electrochemical Society

SCIESCOPUS

Optimization of CO 2 gas cluster generation for cleaning application Go to Link

Choi, Hoomi; Kim, Hojoong; Yoon, Deokjoo; Lee, Jongwoo; Kang, Bong Kyun; Kim, Min su; Park, Jin-Goo; Kim, Tae sung

ArticleIssue Date2011CitationECS Transactions, v.41, no.5, pp 237 - 242PublisherThe Electrochemical Society

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Browsing by Choi, HoomiAuthor

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