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Showing results 1 to 2 of 2
SCIE
SCOPUS
KCI
Micromachined Si cantilever arrays for parallel AFM operation
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Ahn, Yoomin
; Ono, Takahito; Esashi, Masayoshi
Article
Issue Date
2008
Citation
JOURNAL OF MECHANICAL SCIENCE AND TECHNOLOGY, v.22, no.2, pp.308 - 311
Publisher
KOREAN SOC MECHANICAL ENGINEERS
SCIE
SCOPUS
Si multiprobes integrated with lateral actuators for independent scanning probe applications
Go to Link
Ahn, Yoomin
; Ono, Takahito; Esashi, Masayoshi
Article
Issue Date
2005
Citation
JOURNAL OF MICROMECHANICS AND MICROENGINEERING, v.15, no.6, pp.1224 - 1229
Publisher
IOP PUBLISHING LTD
1
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