Kang, Young jae; Kang, Bong kyun; Park, Jin goo; Hong, Yi koan; Han, Sang yeob; Yun, Seong kyu; Yoon, Bo un; Hong, Chang ki
ArticleIssue Date2007CitationICPT 2007 - International Conference on Planarization/CMP Technology, Proceedings, pp.1 - 6PublisherVDE Verlag GmbH