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Browsing by Kim, Hyun taeAuthor

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A novel cleaning approach to remove the carbon contaminant from Ru surface of EUV mask Go to Link

Kim, Min su; Song, Hee jin; Kim, Hyun tae; Park, Jin-Goo

ArticleIssue Date2017CitationECS Transactions, v.80, no.2, pp 119 - 127PublisherElectrochemical Society, Inc.

SCIESCOPUS

Characterization of ammonium silicate residue during Polysilazane (PSZ) dry etching in NF3/H2O gas chemistry Go to Link

Kim, Hyun tae; Kim, Min su; Lee, Jong seok; Choi, Geun min; Park, Jin goo

ArticleIssue Date2017CitationECS Transactions, v.80, no.2, pp 211 - 219PublisherElectrochemical Society, Inc.

SCOPUS

Development of post InGaAs CMP cleaning process for sub 10nm device application Go to Link

Purushothaman, Muthukrishnan; Choi, In chan; Kim, Hyun tae; Teugels, Lieve; Kim, Tae gon; Park, Jin goo

ArticleIssue Date2017CitationICPT 2017 - International Conference on Planarization/CMP Technology, pp 149 - 154PublisherVDE Verlag GmbH

SCOPUS

Effect of particle contamination on extreme ultraviolet (EUV) mask and megasonic cleaning process for its removal Go to Link

Kim, Min su; Ji, Hye rim; Choi, In chan; Kim, Hyun tae; Jang, Sung hae; Lee, Jun; Kim, In seon; Kim, Jung hwan; Oh, Hye keun; Ahn, Jin ho, et al.

ArticleIssue Date2015CitationECS Transactions, v.69, no.8, pp 101 - 108PublisherElectrochemical Society, Inc.

SCIESCOPUS

Modification of DHF for removal of metals from silicon wafer Go to Link

Lee, Dong Hwan; Song, Hee jin; Jang, Sung hae; Kim, Hyun tae; Yi, Jae Hwan; Choi, Eunsuck; Park, Jin-Goo

ArticleIssue Date2017CitationECS Transactions, v.80, no.2, pp 249 - 256PublisherElectrochemical Society, Inc.

SCOPUS

Prevention of metal contamination in sub 50 nm SC1 cleaning process Go to Link

Kim, Hyun tae; Park, Gun ho; Cho, Byoung jun; Lee, Jung hwan; Kim, Min su; Kim, Jin yong; Park, Jin-Goo

ArticleIssue Date2015CitationECS Transactions, v.69, no.8, pp 69 - 75PublisherElectrochemical Society, Inc.

SCOPUS

Removal of crn contamination from euv mask backside using dry cleaning Go to Link

Kim, Hyun tae; Yerriboina, Nagendra Prasad; Song, Hee jin; Park, Jin-Goo

ArticleIssue Date2018CitationSolid State Phenomena, v.282 , pp 59 - 63PublisherScitec Publications Ltd.

SCOPUS

Submicron particle removal during FPD oxide TFT process Go to Link

Lee, Jun; Kim, Min su; Kim, Hyun tae; Choi, In chan; Kim, Woo young; Lim, Dae seung; Park, Jin-Goo

ArticleIssue Date2015CitationECS Transactions, v.69, no.8, pp 95 - 100PublisherElectrochemical Society, Inc.

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Browsing by Kim, Hyun taeAuthor

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