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Browsing by Kim, JiseongAuthor

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Inherently Area-Selective Atomic Layer Deposition of SiO2 Thin Films to Confer Oxide Versus Nitride Selectivity Go to Link

Lee, Jinseon; Lee, Jeong-Min; Oh, Hongjun; Kim, Changhan; Kim, Jiseong; Kim, Dae Hyun; Shong, Bonggeun; Park, Tae Joo; Kim, Woo-Hee

ArticleIssue Date2021CitationAdvanced Functional Materials, v.31, no.33, pp 1 - 10PublisherJohn Wiley & Sons Ltd.

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Inhibitor-free area-selective atomic layer deposition of SiO2 through chemoselective adsorption of an aminodisilane precursor on oxide versus nitride substrates Go to Link

Lee, Jeong-Min; Lee, Jinseon; Oh, Hongjun; Kim, Jiseong; Shong, Bonggeun; Park, Tae Joo; Kim, Woo-Hee

ArticleIssue Date2022CitationApplied Surface Science, v.589, pp 1 - 9PublisherElsevier BV

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Browsing by Kim, JiseongAuthor

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